Li, Zhihong
Professor
Research Interests: Microelectromechanical system
Office Phone: 86-10-6276 6581
Email: zhhli@pku.edu.cn
Li, Zhihong received his B.S. degree in the Department of Computer Science and Technology, Peking University, China, in 1992. He received his Ph.D. degree at the Institute of Microelectronics, Peking University, majoring in VLSI technology and reliability, in 1997. He joined in the MEMS group at this institute afterwards. He was a visiting scholar at Cornell University and University of California, Davis from 2000 to 2004, respectively. Presently, he is a Professor at MEMS Research Center, Institute of Microelectronics, Peking University. His research interests include design and fabrication of Microelectromechanical Systems (MEMS), especially Bio MEMS and RF MEMS.
Dr. Li has published more than 200 scientific articles in prestigious peer-reviewed journals such as ACS Nano, Analytical Chemistry, Lab on a Chip, Scientific Reports, Journal of Microelectromechanical Systems, Journal of Micromechanics and Microengineering, Applied Physics Letters, and international conferences. He has given more than 10 invited speeches in international conferences and workshops.
Dr. Li has more than ten research projects including NSFC, 973 programs, 863 project, etc. His research achievements are summarized as follows:
1) Microelectrode array for biomedical applications. He invented a cell electroporation chip with the annular interdigital electrodes, in which cell transfection and survival rates are much higher than the reported micro-chip and large commercial electroporation instrument. In addition, his group developed flexible thin-film microelectrodes for in vivo cell electroporation, inhibiting tumor cells in vivo. The three-dimensional electrode based on flexible substrate and a light switchable microelectrode array based on photoconductive properties of the intrinsic amorphous silicon are superior to the existing retina chips.
2) BioMEMS and micro-nanofluidic systems integration: This approach enables integration of the self-assembled biological systems, MEMS, microfluidics and CMOS in a single chip, integrating SOC and LOC.
3) A variety of RF MEMS switches. His group developed SiN isolation and non-doped polysilicon isolation, as well as partial release technology. Invent the micro-spring contact MEMS switch of high-power handling capability. He and collaborators proposed arch structure with two kinds of instability, pull-in and snap-through, and establish a theoretical model which can explain the phenomenon of two mechanics.
