Wu, Wengang
Professor
Research Interests: MEMS/NEMS, GaN-based devices
Office Phone: 86-10-6276 7553
Email: wuwg@pku.edu.cn
Wu, Wengang is a professor in the Department of Microelectronics, School of EECS, Peking University. He has served as Head of the Department as well as Vice Director of the Institute of Microelectronics since 2012. He also served as Vice Dean of the School of EECS from 2006 to 2010. He obtained his B.Sc. degree from Fudan University in 1989 and Ph.D. degree from Xi'an Jiaotong University in 1995, respectively, majoring in electronic engineering. He made postdoctoral researches at the Institute of Semiconductors, Chinese Academy of Sciences from 1995 to 1997 and, subsequently, at the University of California at Los Angeles (UCLA) from 1997 to 2000. He joined the faculty of Peking University in 2000. His current research interests include micro/nano-fabrication technologies, micro/nano-electromechanical systems (M/NEMS), and GaN-based devices.
Dr. Wu has authored and co-authored over 200 research papers, and some of them are published in top-tier journals and conferences, such as Adv. Mater., Nano Lett., Small, Nanoscale, Sci. Rep., Nanotechnology, Appl. Phys. Lett., J. Lightwave Technol., IEEE Electr. Device L., Sensor Actuat. A-Phys., J. Micromech. Microeng., IEEE MEMS, Transducers, CLEO and MicroTAS. He has also invented and co-invented 33 patents. He served on the technical program or organization committees of some international conferences, for example, Transducers, IEEE NEMS, and ICSICT. He is in the Editorial Committee of Journal “Research & Progress of Solid State Electronics”. He was the editor of Journal “Science in China F: Information Science”.
Dr. Wu has devoted himself to about 30 research projects from NSFC, 973 programs, and 863 programs, etc. His research achievements are summarized as follows:
1) Micro/nano fabrication technology: He proposed diversiform novel micro/nano fabrication technologies, including the focused-ion-beam stress induced and material-redistribution induced three-dimensional (3D) deformations, the oxygen plasma stripping of polymers for nano-forests synthesis, the crossed spacer and overlapped spacer techniques, and diffraction-introduced photolithography, etc. These technologies have been applied to produce various micro/nano functional structures in electronic, optical and sensing devices.
2) Plasmonic metamaterial/metasurface: He is active in the field of plasmonics and related metamaterials/metasurfaces in recent years, designing and realizing the metasurface full-color palettes and colorimetric immunoassay sensors, the tunable metamaterial as reversible switch between mid-wave and long-wave infrared regimes, the metal-film-based 3D chiral optical antennas, and various surface enhanced Raman scattering (SERS) substrates.
3) M/NEMS devices: He also developed different kinds of new M/NEMS devices or components. They are micro torsion mirror actuated by hybrid electrostatic drives, monolithic multifunctional device for optical power splitting, switching and attenuating, monolithic inductor-capacitor oscillators, MOSFET-embedded cantilever biochemical sensors, intercoupled dual-cantilevels mass sensors, microfluidic SERS sensors, and open surface microfluidic channels for cell and nanoparticle patterning, etc.
